Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488807 | Plasma processing apparatus, processing method, and upper electrode structure | Kota SHIHOMMATSU, Junji Ishibashi, Junichi Sasaki | 2022-11-01 |
| 11417500 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Yasuharu Sasaki, Tomohiko Akiyama | 2022-08-16 |