Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488807 | Plasma processing apparatus, processing method, and upper electrode structure | Junji Ishibashi, Junichi Sasaki, Hidetoshi Hanaoka | 2022-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488807 | Plasma processing apparatus, processing method, and upper electrode structure | Junji Ishibashi, Junichi Sasaki, Hidetoshi Hanaoka | 2022-11-01 |