AN

Akira Nagayama

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
📍 Rifu, JP: #134 of 319 inventorsTop 45%
Overall (2022): #541,757 of 548,613Top 100%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11538715 Stage and substrate processing apparatus Ryo CHIBA, Yasuharu Sasaki 2022-12-27