Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532517 | Localized etch stop layer | Yun Han, Andrew Metz, Xinghua Sun, David L. O'Meara, Kandabara Tapily +1 more | 2022-12-20 |
| 11424123 | Forming a semiconductor feature using atomic layer etch | Eric Chih-Fang Liu, Akiteru Ko, Angelique Raley, Henan Zhang, Subhadeep Kal | 2022-08-23 |
| 11289325 | Radiation of substrates during processing and systems thereof | Michael Edley, Xinghua Sun, Yen-Tien Lu, Angelique Raley, Henan Zhang +1 more | 2022-03-29 |