Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289325 | Radiation of substrates during processing and systems thereof | Xinghua Sun, Yen-Tien Lu, Angelique Raley, Henan Zhang, Hiroyuki Suzuki +1 more | 2022-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289325 | Radiation of substrates during processing and systems thereof | Xinghua Sun, Yen-Tien Lu, Angelique Raley, Henan Zhang, Hiroyuki Suzuki +1 more | 2022-03-29 |