Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil, Martin Lee Riker +1 more | 2022-11-08 |
| 11492704 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2022-11-08 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Ananthkrishna Jupudi | 2022-06-28 |