Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532462 | Method and system for cleaning a process chamber | Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11512391 | Process kit for a high throughput processing chamber | Mayur Govind Kulkarni, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2022-11-29 |
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Mayur Govind Kulkarni, Sanjeev Baluja, Praket P. Jha, Krishna Nittala | 2022-11-22 |