Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515149 | Deposition of flowable silicon-containing films | Lakmal C. Kalutarage, Mark Saly, Abhijit Basu Mallick, Tejasvi Ashok, Pramit Manna | 2022-11-29 |
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu +3 more | 2022-11-01 |
| 11450525 | Selective aluminum oxide film deposition | Liqi Wu, Hung T. Nguyen, Bhaskar Jyoti Bhuyan, Mark Saly, Feng Q. Liu | 2022-09-20 |
| 11286564 | Tin-containing precursors and methods of depositing tin-containing films | Thomas Knisley, Mark Saly | 2022-03-29 |
| 11289328 | Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing | Thomas Knisley, Mark Saly, Lakmal C. Kalutarage | 2022-03-29 |