Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11177124 | Substrate processing method and substrate processing apparatus | Hiroshi Abe | 2021-11-16 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Yasunori Kanematsu, Kenji AMAHISA +1 more | 2021-10-19 |
| 11139180 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2021-10-05 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 10964526 | Substrate processing method | Kenji Kobayashi, Naohiko YOSHIHARA | 2021-03-30 |
| 10921057 | Substrate drying method and substrate processing apparatus | Noriyuki KIKUMOTO, Naohiko YOSHIHARA, Hiroshi Abe | 2021-02-16 |