Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201067 | Substrate treatment method and substrate treatment device | — | 2021-12-14 |
| 11154913 | Substrate treatment method and substrate treatment device | — | 2021-10-26 |
| 11124869 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Naozumi Fujiwara, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2021-09-21 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Manabu OKUTANI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 11094524 | Substrate processing method and substrate processing apparatus | — | 2021-08-17 |
| 11036139 | Sacrificial film forming method, substrate treatment method, and substrate treatment device | — | 2021-06-15 |
| 10935825 | Substrate processing method | — | 2021-03-02 |
| 10900127 | Substrate processing method and substrate processing apparatus | — | 2021-01-26 |
| 10886133 | Substrate processing method and substrate processing device | Daisuke Shimizu, Shota IWAHATA | 2021-01-05 |