Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124869 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Masayuki OTSUJI, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2021-09-21 |
| 11033929 | Application method | — | 2021-06-15 |