Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158523 | Substrate drying method and substrate drying apparatus | Yosuke HANAWA | 2021-10-26 |
| 11151539 | Log-in control apparatus, control method of log-in control apparatus, and information terminal | — | 2021-10-19 |
| 11133175 | Substrate treating method and substrate treating apparatus | Yosuke HANAWA, Dai Ueda | 2021-09-28 |
| 11124869 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Masayuki OTSUJI, Naozumi Fujiwara, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2021-09-21 |
| 11094565 | Substrate treating method, substrate treating liquid and substrate treating apparatus | Yosuke HANAWA | 2021-08-17 |