Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158523 | Substrate drying method and substrate drying apparatus | Yuta SASAKI | 2021-10-26 |
| 11133175 | Substrate treating method and substrate treating apparatus | Dai Ueda, Yuta SASAKI | 2021-09-28 |
| 11094565 | Substrate treating method, substrate treating liquid and substrate treating apparatus | Yuta SASAKI | 2021-08-17 |