Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Song Zhang +2 more | 2021-12-28 |
| 11133175 | Substrate treating method and substrate treating apparatus | Yosuke HANAWA, Yuta SASAKI | 2021-09-28 |