Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11101147 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 11094529 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama | 2021-08-17 |
| 11020776 | Substrate cleaning method and substrate cleaning apparatus | — | 2021-06-01 |