Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA +2 more | 2021-08-24 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Michinori IWAO, Noriyuki KIKUMOTO, Mitsutoshi SASAKI | 2021-03-02 |