Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081376 | Substrate processing apparatus, transfer module, and coupling module | Yuichi TAKAYAMA, Koji Hashimoto | 2021-08-03 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Shuichi Yasuda, Michinori IWAO, Mitsutoshi SASAKI | 2021-03-02 |
| 10921057 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Naohiko YOSHIHARA, Hiroshi Abe | 2021-02-16 |