Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Yasunori Kanematsu, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 11139180 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2021-10-05 |
| 10964526 | Substrate processing method | Manabu OKUTANI, Kenji Kobayashi | 2021-03-30 |
| 10921057 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Noriyuki KIKUMOTO, Hiroshi Abe | 2021-02-16 |