Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA +2 more | 2021-08-24 |