Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152204 | Substrate processing method and substrate processing apparatus | Tsutomu OSUKA, Naohiko YOSHIHARA, Yasunori Kanematsu, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 10950466 | Substrate processing method and substrate processing apparatus | — | 2021-03-16 |
| 10903092 | Substrate processing apparatus and substrate processing method | Koji Ando | 2021-01-26 |