Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211264 | Substrate processing apparatus and substrate processing method | Ryo MURAMOTO | 2021-12-28 |
| 11043398 | Substrate processing device | — | 2021-06-22 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Shuichi Yasuda, Noriyuki KIKUMOTO, Mitsutoshi SASAKI | 2021-03-02 |
| 10882080 | Substrate processing apparatus and method of processing substrate | — | 2021-01-05 |