Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094529 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA | 2021-08-17 |
| 11052432 | Substrate processing method and substrate processing apparatus | Masayuki Hayashi, Toru Endo | 2021-07-06 |
| 11018034 | Substrate processing method and substrate processing apparatus | Toru Endo, Masayuki Hayashi | 2021-05-25 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita +1 more | 2021-05-18 |
| 10978317 | Substrate processing method and substrate processing apparatus | Toru Endo, Masayuki Hayashi | 2021-04-13 |