Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Yasunori Kanematsu, Manabu OKUTANI +1 more | 2021-10-19 |
| 11052432 | Substrate processing method and substrate processing apparatus | Nobuyuki Shibayama, Toru Endo | 2021-07-06 |
| 11018034 | Substrate processing method and substrate processing apparatus | Toru Endo, Nobuyuki Shibayama | 2021-05-25 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Nobuyuki Shibayama, Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita +1 more | 2021-05-18 |
| 10978317 | Substrate processing method and substrate processing apparatus | Toru Endo, Nobuyuki Shibayama | 2021-04-13 |