Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099105 | Data processing method, data processing device, and non-transitory computer-readable recording medium having recorded thereon data processing program | Mayumi Yamamoto | 2021-08-24 |
| 11054801 | Data processing method, data processing apparatus, data processing system, and recording medium having recorded therein data processing program | Takashi Ikeuchi | 2021-07-06 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hiroaki KAKUMA, Yuji Okita +1 more | 2021-05-18 |
| 10985038 | Determination method and substrate processing equipment | Hiroaki KAKUMA, Yuji Okita, Tatsuya MASUI | 2021-04-20 |