Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hideji NAOHARA, Hiroaki KAKUMA +1 more | 2021-05-18 |
| 10985038 | Determination method and substrate processing equipment | Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita | 2021-04-20 |