Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11164723 | Methods and apparatus for etching semiconductor structures | Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-11-02 | $95,673,000 |
| 10930471 | Methods and apparatus for etching semiconductor structures | Taiki Hatakeyama, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-02-23 | $34,793,000 |
| 10886133 | Substrate processing method and substrate processing device | Masayuki OTSUJI, Shota IWAHATA | 2021-01-05 |