Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, John C. Forster, Philip Allan Kraus, Yang Guo +5 more | 2021-11-09 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, David T. Or | 2021-10-19 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |