Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Kwang-Nam Kim, Sung Yeon Kim, Hyung Jun Kim, Jong-Woo Sun, Sang Rok Oh | 2021-06-15 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun +3 more | 2021-04-06 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |