Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Masahiko TAKIMOTO, Kenta KONDO, Ryousuke Dohi, Kouji Nishino | 2021-11-30 |
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi | 2021-08-24 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |