Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Masahiko TAKIMOTO, Toshihide Yoshida, Ryousuke Dohi, Kouji Nishino | 2021-11-30 |
| 11073215 | Gas supply system | Takeru Miura, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Hidenobu Sato | 2021-07-27 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe +2 more | 2021-06-29 |