Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Toshihide Yoshida, Kenta KONDO, Ryousuke Dohi, Kouji Nishino | 2021-11-30 |
| 11137779 | Fluid control device, method for controlling fluid control device, and fluid control system | Kaoru Hirata, Katsuyuki Sugita, Yohei Sawada, Kouji Nishino | 2021-10-05 |
| 10883866 | Pressure-based flow rate control device and malfunction detection method therefor | Katsuyuki Sugita, Kouji Nishino, Kaoru Hirata, Nobukazu Ikeda | 2021-01-05 |
| 10884436 | Flow rate signal correction method and flow rate control device employing same | Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Masayoshi Kawashima +1 more | 2021-01-05 |