Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137779 | Fluid control device, method for controlling fluid control device, and fluid control system | Kaoru Hirata, Katsuyuki Sugita, Masahiko TAKIMOTO, Kouji Nishino | 2021-10-05 |
| 10969259 | Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device | Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2021-04-06 |
| 10928813 | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition | Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2021-02-23 |
| 10895484 | Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method | Nobukazu Ikeda, Kouji Nishino, Masaaki Nagase | 2021-01-19 |