Issued Patents 2021
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Masahiko TAKIMOTO, Toshihide Yoshida, Kenta KONDO, Ryousuke Dohi | 2021-11-30 |
| 11137779 | Fluid control device, method for controlling fluid control device, and fluid control system | Kaoru Hirata, Katsuyuki Sugita, Yohei Sawada, Masahiko TAKIMOTO | 2021-10-05 |
| 11079774 | Flow rate control device | Katsuyuki Sugita, Ryousuke Dohi, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda | 2021-08-03 |
| 11054052 | Piezoelectric-element-driven valve and flow rate control device | Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Nobukazu Ikeda | 2021-07-06 |
| 10976240 | Concentration measurement device | Yoshihiro Deguchi, Masaaki Nagase, Michio Yamaji, Nobukazu Ikeda, Masayoshi Kawashima +1 more | 2021-04-13 |
| 10969259 | Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device | Yohei Sawada, Masaaki Nagase, Nobukazu Ikeda | 2021-04-06 |
| 10962513 | Concentration detection method and pressure-type flow rate control device | Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi +2 more | 2021-03-30 |
| 10928813 | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition | Masaaki Nagase, Kaoru Hirata, Yohei Sawada, Katsuyuki Sugita, Nobukazu Ikeda | 2021-02-23 |
| 10928303 | Concentration measuring device | Yoshihiro Deguchi, Takashi Fukawa, Taiki Hattori, Masaaki Nagase, Kazuteru Tanaka +1 more | 2021-02-23 |
| 10895484 | Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method | Yohei Sawada, Nobukazu Ikeda, Masaaki Nagase | 2021-01-19 |
| 10883866 | Pressure-based flow rate control device and malfunction detection method therefor | Katsuyuki Sugita, Kaoru Hirata, Masahiko TAKIMOTO, Nobukazu Ikeda | 2021-01-05 |
| 10884436 | Flow rate signal correction method and flow rate control device employing same | Katsuyuki Sugita, Nobukazu Ikeda, Kaoru Hirata, Masahiko TAKIMOTO, Masayoshi Kawashima +1 more | 2021-01-05 |
| 10884435 | Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same | Masaaki Nagase, Kaoru Hirata, Nobukazu Ikeda | 2021-01-05 |