Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187346 | Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus | Masahiko TAKIMOTO, Toshihide Yoshida, Kenta KONDO, Kouji Nishino | 2021-11-30 |
| 11149871 | Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used | Taiji Chiba, Kazunari Watanabe | 2021-10-19 |
| 11079774 | Flow rate control device | Katsuyuki Sugita, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2021-08-03 |
| 11054052 | Piezoelectric-element-driven valve and flow rate control device | Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2021-07-06 |