Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11162606 | Fluid control device | Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Ryutaro Tanno | 2021-11-02 |
| 11162597 | Flow path assembly and valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2021-11-02 |
| 11156305 | Fluid control system | Kenji Aikawa, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada | 2021-10-26 |
| 11118700 | Valve device and fluid control system | Kazunari Watanabe, Tomohiro Nakata | 2021-09-14 |
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Toshiyuki Inada, Takashi Funakoshi | 2021-08-24 |
| 11067195 | Actuator, valve device, and fluid control apparatus | Masahiko Nakazawa, Nobuo Nakamura, Tomohiro Nakata | 2021-07-20 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |
| 11022242 | Pipe connection structure, pipe connection unit, and connection method of pipe | Tomohiro Nakata | 2021-06-01 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Toshiyuki Inada, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |
| 10998211 | Management system, method, and computer program for semiconductor fabrication apparatus | Ryutaro Tanno, Takahiro Mastuda | 2021-05-04 |
| 10962513 | Concentration detection method and pressure-type flow rate control device | Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi +2 more | 2021-03-30 |