Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada | 2021-08-24 |
| 11041566 | Seal structure, sealing method, and coupling equipped with said seal structure | Koji Hiramatsu, Michio Yamaji, Kunihiko Daido, Tadayuki Yakushijin, Yasumasa Yanagida | 2021-06-22 |
| 11035494 | Flow rate control apparatus and flow rate control method for the flow rate control apparatus | Yoshinori Shimomura, Tsuyoshi Tanikawa, Tadayuki Yakushijin | 2021-06-15 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Hidenobu Sato +1 more | 2021-06-01 |