Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11174949 | Actuator and valve device using the same | Tatsuhiko SATO, Takeru Miura | 2021-11-16 |
| 11162597 | Flow path assembly and valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Takahiro Matsuda, Tsutomu Shinohara | 2021-11-02 |
| 11118700 | Valve device and fluid control system | Kazunari Watanabe, Tsutomu Shinohara | 2021-09-14 |
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi | 2021-08-24 |
| 11073215 | Gas supply system | Takeru Miura, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO, Hidenobu Sato | 2021-07-27 |
| 11067195 | Actuator, valve device, and fluid control apparatus | Masahiko Nakazawa, Nobuo Nakamura, Tsutomu Shinohara | 2021-07-20 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tsutomu Shinohara, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |
| 11022242 | Pipe connection structure, pipe connection unit, and connection method of pipe | Tsutomu Shinohara | 2021-06-01 |