Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Takashi Funakoshi | 2021-08-24 |
| 11073215 | Gas supply system | Takeru Miura, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO, Hidenobu Sato | 2021-07-27 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |