Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11162606 | Fluid control device | Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Tsutomu Shinohara | 2021-11-02 |
| 10998211 | Management system, method, and computer program for semiconductor fabrication apparatus | Takahiro Mastuda, Tsutomu Shinohara | 2021-05-04 |