Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998211 | Management system, method, and computer program for semiconductor fabrication apparatus | Ryutaro Tanno, Tsutomu Shinohara | 2021-05-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998211 | Management system, method, and computer program for semiconductor fabrication apparatus | Ryutaro Tanno, Tsutomu Shinohara | 2021-05-04 |