| 11177146 |
Methods and apparatus for processing a substrate |
Qi Jie Peng, Chin Wei Tan, Jun-Liang Su, Fang Jie Lim, Arvind Sundarrajan +1 more |
2021-11-16 |
| 11111583 |
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity |
Karthik Elumalai, Jen Sern Lew, Mingwei Zhu |
2021-09-07 |
| 11053590 |
Nozzle for uniform plasma processing |
Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Shoju Vayyapron, Cheng Sun |
2021-07-06 |
| 10978334 |
Sealing structure for workpiece to substrate bonding in a processing chamber |
Chin Hock Toh, Tuck Foong Koh, Jen Sern Lew, Arvind Sundarrajan, Seshadri Ramaswami |
2021-04-13 |
| 10930542 |
Apparatus for handling various sized substrates |
Eng Sheng Peh, Karrthik Parathithasan, Fang Jie Lim |
2021-02-23 |
| 10903055 |
Edge ring for bevel polymer reduction |
Rohit Mishra, Graeme Scott, Khalid Mohiuddin Sirajuddin, Sheshraj L. Yulshibagwale |
2021-01-26 |
