Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177146 | Methods and apparatus for processing a substrate | Qi Jie Peng, Chin Wei Tan, Fang Jie Lim, Sriskantharajah Thirunavukarasu, Arvind Sundarrajan +1 more | 2021-11-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177146 | Methods and apparatus for processing a substrate | Qi Jie Peng, Chin Wei Tan, Fang Jie Lim, Sriskantharajah Thirunavukarasu, Arvind Sundarrajan +1 more | 2021-11-16 |