Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053590 | Nozzle for uniform plasma processing | Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2021-07-06 |
| 10903055 | Edge ring for bevel polymer reduction | Graeme Scott, Khalid Mohiuddin Sirajuddin, Sheshraj L. Yulshibagwale, Sriskantharajah Thirunavukarasu | 2021-01-26 |