Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11053590 | Nozzle for uniform plasma processing | Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2021-07-06 | $60,527,000 |
| 10903055 | Edge ring for bevel polymer reduction | Graeme Scott, Khalid Mohiuddin Sirajuddin, Sheshraj L. Yulshibagwale, Sriskantharajah Thirunavukarasu | 2021-01-26 | $35,448,000 |