Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149345 | Cryogenically cooled rotatable electrostatic chuck | Shardul S. Patel | 2021-10-19 |
| 10971327 | Cryogenic heat transfer system | — | 2021-04-06 |
RM
Robert J. Mitchell
Overall (2021): #118,336 of 548,734Top 25%
2
Patents 2021