Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11149345 | Cryogenically cooled rotatable electrostatic chuck | Shardul S. Patel | 2021-10-19 | $109,516,000 |
| 10971327 | Cryogenic heat transfer system | — | 2021-04-06 | $63,491,000 |