Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053590 | Nozzle for uniform plasma processing | Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2021-07-06 |
| 10930542 | Apparatus for handling various sized substrates | Sriskantharajah Thirunavukarasu, Karrthik Parathithasan, Fang Jie Lim | 2021-02-23 |