Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Michinori IWAO, Noriyuki KIKUMOTO | 2020-12-08 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10741422 | Substrate processing device and substrate processing method | Michinori IWAO, Noriyuki KIKUMOTO, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10670809 | Optical transmission device and control method | — | 2020-06-02 |
| 10636682 | Substrate processing apparatus | Noriyuki KIKUMOTO, Masahiro Kimura, Kazuhiro Fujita | 2020-04-28 |
| 10623107 | Optical transmission device and method for controlling optical transmission device | Takeyasu Tomioka | 2020-04-14 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Noriyuki KIKUMOTO, Kazuhiro Fujita, Michinori IWAO | 2020-02-04 |