Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10766054 | Substrate processing method and substrate processing apparatus | — | 2020-09-08 |
| 10651058 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai | 2020-05-12 |