Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825713 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2020-11-03 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10760852 | Substrate drying method and substrate processing apparatus | Noriyuki KIKUMOTO, Naohiko YOSHIHARA, Hiroshi Abe | 2020-09-01 |
| 10755916 | Substrate treatment method and substrate treatment apparatus | Hiroshi Abe, Takashi Ota | 2020-08-25 |
| 10734271 | Substrate processing apparatus and substrate processing method | Takashi Ota, Hiroshi Abe | 2020-08-04 |
| 10695792 | Substrate processing method and substrate processing apparatus | Takashi Ota, Hiroshi Abe, Naohiko YOSHIHARA | 2020-06-30 |
| 10527348 | Substrate processing method and substrate processing apparatus | Naohiko YOSHIHARA, Takashi Ota, Hiroshi Abe | 2020-01-07 |