Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Michinori IWAO, Shuichi Yasuda | 2020-12-08 |
| 10760852 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Naohiko YOSHIHARA, Hiroshi Abe | 2020-09-01 |
| 10741422 | Substrate processing device and substrate processing method | Michinori IWAO, Shuichi Yasuda, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10727090 | Substrate processing apparatus and substrate processing method | Toyohide Hayashi, Naoto Fujita, Michinori IWAO, Wataru Sakai | 2020-07-28 |
| 10636682 | Substrate processing apparatus | Masahiro Kimura, Shuichi Yasuda, Kazuhiro Fujita | 2020-04-28 |
| 10573523 | Substrate processing device which performs processing on substrate | — | 2020-02-25 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Shuichi Yasuda, Kazuhiro Fujita, Michinori IWAO | 2020-02-04 |