Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Noriyuki KIKUMOTO, Shuichi Yasuda | 2020-12-08 |
| 10741422 | Substrate processing device and substrate processing method | Noriyuki KIKUMOTO, Shuichi Yasuda, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10727090 | Substrate processing apparatus and substrate processing method | Noriyuki KIKUMOTO, Toyohide Hayashi, Naoto Fujita, Wataru Sakai | 2020-07-28 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Noriyuki KIKUMOTO, Shuichi Yasuda, Kazuhiro Fujita | 2020-02-04 |